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Fields Medical Life Sciences Information Communication Environment Nanotechnology / Materials Energy Manufacturing Technology Social Infrastructure Frontier Liberal Arts Themes Researchers JP Top Nanotechnology / Materials MEMS/Micromachines and Microfabrication Technology MEMS/Micromachines and Microfabrication Technology JAPANESEINQUIRY update：2020/06/16       NEXT PREV Features and Uniqueness We are studying MEMS (Micro Electro Mechanical Systems) and related technologies, which are typically used for the input/output of information/communication devices, the safety of automobiles etc. Our representative topics include integrated sensors, piezoelectric devices, RF MEMS, micro energy devices and wafer-level packages. Our facilities are open-accessible and well equipped with a lot of tools for lithography, dry/wet etching, thin film deposition, wafer bonding, device mounting and evaluations, which can be operated by each researcher. Using these tools, a variety of MEMS are being prototyped. Also, new microfabrication tools are being developed by ourselves. Practical Application We are collaborating with many companies, from which visiting researchers are dispatched to our laboratory. We also accept companies which want to just use specific tools in our facilities. Consultation is always welcome. Keywords MEMS Sensor Actuator Acoustic resonator Piezoelectric device Micro energy Wafer-level packaging Intergration Micromachining Researchers Graduate School of Engineering Shuji Tanaka, ProfessorDoctor of Engineering Laboratory Website researchmap Laboratory Website researchmap Browsing History Common Keywords Electromagnetic Nondestructive Inspection System for Complicated Structures [ 高木敏行 教授 ] Minimally Invasive Medical Devices and Healthcare Devices Using Micro/Nano Machining Technology [ 芳賀 洋一 教授 ] Hands-On Access Fabrication Facility –Open Facility for MEMS and Semiconductor Prototyping– [ 戸津 健太郎 教授 ] Development of Passive Millimeter-wave Imaging Device for Practical Applications [ 佐藤 弘康 助教 ] Design, fabrication and test of high performance miniaturized sensor and actuator systems [ Froemel Joerg Eckhardt 准教授 ] Lymph node metastasis prediction and treatment evaluation system [ 小玉 哲也 教授 ] User Who Reviewed This Content Also Reviewed Extracorporeal Shock Wave Therapy as a New, Non-Invasive Angiogenic Therapy [ SHIMOKAWA Hiroaki Professor ] Molecular Imaging from Basic Research to Clinical Application [ YANAI Kazuhiko Professor ] Noninvasive Ultrasonic Measurement of Dynamic Properties of Heart and Arteries [ Hiroshi Kanai Professor ] Research Profiles ©TOHOKU UNIVERSITY How to Use FAQ For Researchers Site Policy [jp] ©TOHOKU UNIVERSITY Fields Medical Life Sciences Information Communication Environment Nanotechnology / Materials Energy Manufacturing Technology Social Infrastructure Frontier Liberal Arts Fields Themes Researchers 日本語 ENGLISH Close